LiteScope AFM-in-SEM

Only available in Belgium, the Netherlands and Luxembourg

The unique Nenovision Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that are difficult or almost impossible by conventional instrumentation.

  • In-situ multimodal & correlative analysis
  • Optimized & time-efficient workflow
  • Ultimate performance inside SEM
  • Open-hardware design for easy customization

LiteScope integration into SEM

LiteScope is designed for fast & easy integration to SEMs from different manufacturers in the “Plug & Play” mode. We provide appropriate adapters and feed-throughs that can be customized to client requirements.

The installation is very simple and can be done easily by any SEM user. First, LiteScope is attached by four screws to the adaptation plate, mounted on the SEM sample stage. The electrical cables are plugged into prepared vacuum feedthrough. In total, the whole process of mounting and potential dismounting of the device takes just a few minutes.

LiteScope is connected via its control unit to the same PC that is used to control the SEM. This compact setup enables to perform the correlative AFM-in-SEM measurements at one place, using the NenoView software.

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Benefits of AFM-in-SEM solution

Complex and correlative sample analysis

Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.

In-situ sample characterization

In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.

Precise localization of the region of interest

Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.

Complex in-situ characterisation

AFM brings new inside-to-SEM method of characterisation, enabling the analysis of a broad range of properties:

Material mechanical properties

  • topography
  • local elastic properties (tapping & contact mode)
  • local sample hardness (non-topographic)
  • depth-dependent material characterization
  • various in-situ operations

Material magnetic properties

  • magnetic domain imaging

Material electro-mechanical properties

  • piezoelectric domain imaging

Material electrical properties

  • conductivity map (including insulated areas)
  • local surface potential
  • local electrical properties (non-topographic)
  • sub-nanometer topography

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